Thermally or photochemically activated small molecule delivery polymers and platforms enable `on-demand` delivery of a vapor-phase lubricant, such as pentanol or other alcohols, that enable scheduled or as-needed lubrication of MEMS devices, thereby greatly improving the reliability and lifespan of the devices.
STATEMENT OF GOVERNMENT INTEREST
 This invention was made with Government support under contract no. DE-AC04-94AL85000 awarded by the U.S. Department of Energy to Sandia Corporation. The Government has certain rights in the invention.