A method is provided for making a solar cell. The method includes providing a stack including a substrate, a barrier layer disposed on the substrate, and an anti-reflective layer disposed on the barrier layer, where the anti-reflective layer has charge centers. The method also includes generating a corona with a charging tool and contacting the anti-reflective layer with the corona thereby injecting charge into at least some of the charge centers in the anti-reflective layer. Ultra-violet illumination and temperature-based annealing may be used to modify the charge of the anti-reflective layer.
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH
 This invention was made with government support under 1041895 awarded from the National Science Foundation and the Department of Energy. The United States government has certain rights in the invention.