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METHOD AND TOOL TO REVERSE THE CHARGES IN ANTI-REFLECTION FILMS USED FOR SOLAR CELL APPLICATIONS

United States Patent Application

20150050771
A1
View the Complete Application at the US Patent & Trademark Office
A method is provided for making a solar cell. The method includes providing a stack including a substrate, a barrier layer disposed on the substrate, and an anti-reflective layer disposed on the barrier layer, where the anti-reflective layer has charge centers. The method also includes generating a corona with a charging tool and contacting the anti-reflective layer with the corona thereby injecting charge into at least some of the charge centers in the anti-reflective layer. Ultra-violet illumination and temperature-based annealing may be used to modify the charge of the anti-reflective layer.
Sharma, Vivek (Hillsboro, OR), Tracy, Clarence (Tempe, AZ)
14/ 456,477
August 11, 2014
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH [0002] This invention was made with government support under 1041895 awarded from the National Science Foundation and the Department of Energy. The United States government has certain rights in the invention.