This disclosure provides systems, methods, and apparatus related to vanadium dioxide microactuators. In one aspect, a method includes depositing a vanadium dioxide layer on a sacrificial layer disposed on a substrate. A metal layer is deposited on the vanadium dioxide layer. The metal layer is patterned. Portions of the vanadium dioxide layer that are not covered by the metal layer are removed. At least a portion of the sacrificial layer is removed to form a cantilever-type structure including the vanadium dioxide layer and the metal layer disposed on the vanadium dioxide layer.
STATEMENT OF GOVERNMENT SUPPORT
 This invention was made with government support under Contract No. DE-AC02-05CH11231 awarded by the U.S. Department of Energy, Early Career Award DE-FG02-11ER46796 awarded by the U.S. Department of Energy, Grant No. ECCS-1101779 awarded by the National Science Foundation, and Grant No. EEC-0832819 awarded by the National Science Foundation. The government has certain rights in this invention.