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Ultrahigh Vacuum Process For The Deposition Of Nanotubes And Nanowires

United States Patent Application

View the Complete Application at the US Patent & Trademark Office
A system and method A method of growing an elongate nanoelement from a growth surface includes: (a) cleaning a growth surface on a base element; (b) providing an ultrahigh vacuum reaction environment over the cleaned growth surface; (c) generating a reactive gas of an atomic material to be used in forming the nanoelement; (d) projecting a stream of the reactive gas at the growth surface within the reactive environment while maintaining a vacuum of at most 1.times.10.sup.-4 Pascal; (e) growing the elongate nanoelement from the growth surface within the environment while maintaining the pressure of step c); (f) after a desired length of nanoelement is attained within the environment, stopping direction of reactive gas into the environment; and (g) returning the environment to an ultrahigh vacuum condition.
Das, Biswajit (Henderson, NV), Lee, Myung B. (Blauvelt, NY)
14/ 605,598
January 26, 2015
GOVERNMENT RIGHTS [0002] This invention was made with government support under DE-FC52-05NA26999 awarded by the Department of Energy. The government has certain rights in the invention.