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APPARATUS AND METHOD FOR MAKING COMPOSITION SPREAD ALLOY FILMS

United States Patent Application

20150203955
A1
View the Complete Application at the US Patent & Trademark Office
The present invention describes the design, operation and performance of a new Composition Spread Alloy Film (CSAF) deposition having a rotatable shadow mask and capable of depositing CSAFs of at least two elemental components. The individual components can be deposited simultaneously from physical vapor deposition sources, such as, electron beams, effusion cells, and sputter sources, thus allowing preparation of CSAFs that can contain most metallic elements of the periodic table and other materials amenable to sputtering and physical vapor deposition techniques. Multicomponent materials with lateral composition gradients are deposited in such a way that both the direction and the amplitude of the composition gradient can be controlled independently for all components. An ultra-high vacuum chamber housing the apparatus can be used as a stand-alone device or interfaced with other vacuum chamber apparatus containing the tools for bulk and surface characterization necessary to establish the structure-composition-property relationships of a multicomponent alloy.
Gellman, Andrew J. (Pittsburgh, PA), Miller, James B. (Madison, WI), Fleutot, Benoit G. (Arras, FR)
CARNEGIE MELLON UNIVERSITY, a Pennsylvania Non-Profit Corporation (Pittsburgh PA)
14/ 535,644
November 7, 2014
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT [0002] This invention was made with government support under the Department of Energy, National Energy Technology Laboratory under RES contract DE-FE0004000 and 41817M2053-RDS. The government has certain rights in this invention.