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United States Patent Application

View the Complete Application at the US Patent & Trademark Office
An optical component arranged for use in a low pressure environment including: a surface arranged to receive extreme ultra-violet (EUV) light and a coating, on the surface, arranged to block at least one contaminant in the low pressure environment from binding to the surface. A method of mitigating contamination of a surface of an optical component, including: inserting the optical component into a chamber for a semi-conductor inspection system, controlling a temperature and a pressure within the chamber, introducing a blocking material, in a gaseous state, into the chamber, coating a surface of the optical component with the blocking material, and preventing, using the coating, a contaminant in the chamber from binding to the optical component.
Klebanoff, Leonard E. (Dublin, CA), Hollenshead, Jeromy T. (Albuquerque, NM), Delgado, Gildardo (Livermore, CA), Starodub, Elena (Sunnyvale, CA), Umstadter, Karl R. (Livermore, CA), Zhuang, Guorong V. (Santa Clara, CA), Rose, Garry (Livermore, CA)
14/ 101,065
December 9, 2013
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT [0002] This invention was made under a CRADA (SC11/01785.00) between KLA-Tencor and Sandia National Laboratories, operated for the United States Department of Energy. The Government has certain rights in this invention.