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TEM MEMS device holder and method of fabrication

United States Patent Application

20060025002
A1
View the Complete Application at the US Patent & Trademark Office
Lawrence Berkeley National Laboratory - Visit the Technology Transfer and Intellectual Property Management Department Website
A device and method for fabricating a device holder for use with a standard holder body of a transmission electron microscope for use with in situ microscopy of both static and dynamic mechanisms. One or more electrical contact fingers is disposed between a baseplate and a frame, with a MEMS device making contact with the electrical contact fingers. A connector is provided to matingly engage the transmission electron microscope and the device holder to couple the device holder to the transmission electron microscope. Once clamped between the baseplate and frame, the electrical contact fingers may be separated from the template.
Zhang, Ming (Boise, ID), Petrov, Ivan (Champaign, IL), Wen, Jianguo (Champaign, IL), Stach, Eric A. (West Lafayette, IN), Allen, Leslie H. (Champaign, IL), Robertson, Ian (Champaign, IL), Olson, Eric A. (Champaign, IN)
The Board of Trustees of the University of Illinois
11/ 192,300
July 28, 2005
STATEMENT OF GOVERNMENTAL INTEREST [0002] This invention was made with Government support under Contract Number DEFG02-91-ER45439 and DEAC03-76SF00098 awarded by the Department of Energy (DOE). The Government has certain rights in the invention.