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SEPARATION OF FUNCTION-BASED THIN-FILM DEPOSITION SYSTEMS AND METHOD FOR SYNTHESIS OF COMPLEX MATERIALS

United States Patent Application

20140262753
A1
View the Complete Application at the US Patent & Trademark Office
Lawrence Livermore National Laboratory - Visit the Industrial Partnerships Office Website
A thin-film deposition system and method based on separating the function of multiple material sources by locating the sources in separate chambers partitioned by a partition wall, and providing a substrate conveyer, such as a rotating platform, to cyclically convey a substrate between the partitioned chambers so that the materials from the separated sources are serially introduced to the substrate per cycle in isolation of each other for layer-by-layer deposition and/or reaction on the substrate.
Barbee, JR., Troy W. (Palo Alto, CA)
13/ 843,252
March 15, 2013
FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT [0001] The United States Government has rights in this invention pursuant to Contract No. DE-AC52-07NA27344 between the United States Department of Energy and Lawrence Livermore National Security, LLC for the operation of Lawrence Livermore National Laboratory.