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PROCESS FOR LARGE-SCALE AMMONOTHERMAL MANUFACTURING OF SEMIPOLAR GALLIUM NITRIDE BOULES

United States Patent Application

20130323490
A1
View the Complete Application at the US Patent & Trademark Office
Methods for large-scale manufacturing of semipolar gallium nitride boules are disclosed. The disclosed methods comprise suspending large-area single crystal seed plates in a rack, placing the rack in a large diameter autoclave or internally-heated high pressure apparatus along with ammonia and a mineralizer, and growing crystals ammonothermally. A bi-faceted growth morphology may be maintained to facilitate fabrication of large area semipolar wafers without growing thick boules.
D'EVELYN, MARK P. (SANTA BARBARA, CA), EHRENTRAUT, DIRK (SANTA BARBARA, CA), KAMBER, DERRICK S. (SANTA BARBARA, CA), DOWNEY, BRADLEY C. (SANTA BARBARA, CA)
13/ 908,836
June 3, 2013
GOVERNMENT LICENSE RIGHTS [0002] This invention was made with government support under Contract DE-SC0006168 awarded by the U.S. Department of Energy. The government has certain rights in the invention.