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United States Patent Application

View the Complete Application at the US Patent & Trademark Office
A magnetic device includes a semiconductor wafer, a spiral winding, and a magnetic core. The spiral winding forms a plurality of turns and is disposed in a channel of the semiconductor wafer. The magnetic core is disposed at least partially in the channel of the semiconductor wafer and at least partially surrounds the plurality of turns. A width of the spiral winding optionally varies such that a respective width of an edge turn is smaller than a respective width of a middle turn. The channel is formed, for example, by a method including (1) patterning a resist layer on the semiconductor wafer using a mask including angularly extending compensation features, and (2) anistropically etching the semiconductor wafer to form the channel.
Harburg, Daniel V. (Norwich, VT), Sullivan, Charles R. (West Lebanon, NH), Levey, Christopher G. (Thetford Center, VT), Stauth, Jason T. (Hanover, NH)
13/ 911,900
June 6, 2013
GOVERNMENT RIGHTS [0002] This invention was made with government support under contract number DE-AR0000123 awarded by the Department of Energy Advanced Research Project Agency. The government has certain rights in the invention.