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LIGA developer apparatus system

United States Patent Application

20050155707
A1
View the Complete Application at the US Patent & Trademark Office
Sandia National Laboratories - Visit the Intellectual Property Management and Licensing Website
A system to fabricate precise, high aspect ratio polymeric molds by photolithograpic processe is described. The molds for producing micro-scale parts from engineering materials by the LIGA process. The invention is a developer system for developing a PMMA photoresist having exposed patterns comprising features having both very small sizes, and very high aspect ratios between part minimum feature size and part overall dimension. The developer system of the present invention comprises a developer tank, an intermediate rinse tank and a final rinse tank, each tank having a source of high frequency sonic agitation, temperature control, and continuous filtration. It has been found that by moving a patterned, LIGA wafer, through a specific sequence of developer/rinse solutions, wherein the solutions are agitated with a source of high frequency sonic vibration, wherein the solution temperature of each tank is adjusted and closely controlled, and wherein the solutions are continuously recirculated and filtered, it is possible to maintain the kinetic dissolution of the exposed PMMA polymer as the rate limiting step.
Boehme, Dale R. (Pleasanton, CA), Bankert, Michelle A. (San Francisco, CA), Christenson, Todd R. (Albuquerque, NM)
11/ 015,364
December 15, 2004
[0001] The United States Government has rights in this invention pursuant to Contract No. DE-AC04-94AL85000 between the United States Department of Energy and the Sandia Corporation for the operation of the Sandia National Laboratories.