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GRAPHENE-BASED STRUCTURE, METHOD OF SUSPENDING GRAPHENE MEMBRANE, AND METHOD OF DEPOSITING MATERIAL ONTO GRAPHENE MEMBRANE

United States Patent Application

20120183738
A1
View the Complete Application at the US Patent & Trademark Office
Lawrence Berkeley National Laboratory - Visit the Technology Transfer and Intellectual Property Management Department Website
An embodiment of a method of suspending a graphene membrane on a support structure includes attaching graphene to a substrate. A pre-fabricated support structure having the gap is attached to the graphene. The graphene and the pre-fabricated support structure are then separated from the substrate which leaves the graphene membrane suspended on the pre-fabricated support structure. An embodiment of a method of depositing material includes placing a support structure having a suspended graphene membrane under vacuum. A precursor is adsorbed to a surface of the graphene membrane. A portion of the graphene membrane is exposed to a focused electron beam which deposits a material from the precursor onto the graphene membrane. An embodiment of a graphene-based structure includes a support structure having a gap, a graphene membrane suspended across the gap, and a material deposited in a pattern on the graphene membrane.
Zettl, Alexander K. (Kensington, CA), Meyer, Jannik Christian (Blaubeuren, DE)
The Regents of the University of California (Oakland CA)
13/ 420,226
March 14, 2012
STATEMENT OF GOVERNMENTAL SUPPORT [0002] This invention was made with government support under Contract No. DE-AC02-05CH11231 awarded by the U.S. Department of Energy. The government has certain rights in this invention.