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Glassy Surface Smoothing Layer for Integrated Waveguide

United States Patent Application

View the Complete Application at the US Patent & Trademark Office
An integrated optical waveguide includes a substrate, a waveguide under-cladding layer disposed on the substrate, and a waveguide core, having top and sidewall surfaces, disposed on the under-cladding layer. A glassy surface smoothing layer disposed on the waveguide core top surface and sidewall surfaces and has a refractive index, relative to a refractive index of the waveguide core, that enables guided optical transmission through the waveguide core and the glassy surface smoothing layer. In fabrication of the optical waveguide, a waveguide under-cladding layer is formed on a substrate and a waveguide core having sidewall surfaces and a top surface is formed on the under-cladding layer. A liquid suspension comprising particles of a glassy material is applied on the top and sidewall surfaces of the waveguide core. The applied liquid glassy particle suspension is heated to form a glassy surface smoothing layer on the waveguide core top surface and sidewall surfaces.
Hu, Juejun (Newark, DE), Carlie, Nathan A. (Waverly, PA), Petit, Laeticia C. (Lohja, FI), Agarwal, Anuradha M. (Weston, MA), Richardson, Kathleen A. (Clemson, SC), Kimerling, Lionel C. (Concord, MA)
13/ 106,986
May 13, 2011
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH [0002] This invention was made with Government support under Contract No. DE-SC52-06NA27341 and Contract No. DE-FG52-06NA27502, funded by the Department of Energy. The Government has certain rights in the invention.