Skip to Content
Find More Like This
Return to Search

Method for preparing nanocrystalline ceramic thin films

United States Patent Application

20040247791
A1
View the Complete Application at the US Patent & Trademark Office
Oak Ridge National Laboratory - Visit the Partnerships Directorate Website
A method for preparing nanocrystalline ceramic thin films, particularly at low firing temperatures <1000.degree. C. The method for preparing ceramic thin films comprises preparing a seed gel of metal oxide, dissolving a source compound for cations of the oxide's metal constituents in the solution, then adding a polymerizable organic solvent to the solution and heating to form a polymeric precursor having uniformly dispersed gel seeds within a solid gel structure whereby any voids within the structure are filled with metal cation-containing polymeric precursor. The polymeric precursor is free of precipitates. A surface of a substrate is then coated with at least one layer of the gel-seeded polymeric precursor to form a uniform film of gel-seeded polymeric precursor wherein the film has a thickness of 100 nm to 200 nm per layer. The film is then sintered to convert the film to a nanocrystalline ceramic thin film having a thickness of 100 nm to 1 .mu.m and being substantially free of defects.
Hu, Michael Z. (Knoxville, TN), Dong, Junhang (Los Lunas, NM)
United States Department of Energy
10/ 453,704
June 3, 2003
[0001] The invention was made with government support under contract no. DE-AC05-00OR22725 awarded by the United States Department of Energy to UT-Battelle, LLC., and the government has certain rights in the invention.