Diamond-like carbon (DLC) coated nanoprobes and methods for fabricating such nanoprobes are provided. The nanoprobes provide hard, wear-resistant, low friction probes for use in such applications as atomic force microscopy, nanomachining, nanotribology, metrology and nanolithography. The diamond-like carbon coatings include a carbon implantation layer which increases adhesion of a deposited DLC layer to an underlying nanoprobe tip.
STATEMENT OF GOVERNMENT RIGHTS
 Research funding was provided for this invention by the Department of Energy under grant number DE-FG07-025F22617 and by the Air Force Office of Scientific Research under grant number FA 9550-05-1-0204. The United States government has certain rights in this invention.