Skip to Content
Find More Like This
Return to Search


United States Patent Application

View the Complete Application at the US Patent & Trademark Office
Methods and devices are provided for improved deposition systems. In one embodiment of the present invention, a deposition system is provided for use with a solution and a substrate. The system comprises of a solution deposition apparatus; at least one heating chamber; at least one assembly for holding a solution over the substrate; and a substrate curling apparatus for curling at least one edge of the substrate to define a zone capable of containing a volume of the solution over the substrate. In another embodiment of the present invention, a deposition system for use with a substrate, the system comprising a solution deposition apparatus; at heating chamber; and at least assembly for holding solution over the substrate to allow for a depth of at least about 0.5 microns to 10 mm.
Roussillon, Yann (Sunnyvale, CA), Utthachoo, Piyaphant (San Jose, CA), Green, Geoffrey T. (Belmont, CA), Shelton, Addison (Sunnyvale, CA), Scholz, Jeremy H. (Sunnyvale, CA)
12/ 738,392
October 17, 2008
[0001] This invention was made with Government support under Contract No. DE-FC36-07GO17047 awarded by the Department of Energy. The Government has certain rights in this invention.