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PLASMA TREATMENT OF CARBON-BASED MATERIALS AND COATINGS FOR IMPROVED FRICTION AND WEAR PROPERTIES

United States Patent Application

20100203339
A1
View the Complete Application at the US Patent & Trademark Office
A method of plasma modification of a film includes applying about -400 V to about -600 V to a gas in a chamber to generate a gas-discharge plasma; and subjecting the film to the gas-discharge plasma to form a plasma-modified film, where the gas comprises H.sub.2, H.sub.2S, NH.sub.3, deuterium, methane, or a mixture of any two or more. Films may be prepared. Devices coated with the films may be prepared.
Eryilmaz, Osman (Plainfield, IL), Erdemir, Ali (Naperville, IL)
12/ 684,477
January 8, 2010
GOVERNMENT RIGHTS [0002] The United States Government has rights in this invention pursuant to Agreement/Award Number DE-AC02-06CH11357 between the United States Department of Energy and UChicago Argonne, LLC.