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United States Patent Application

View the Complete Application at the US Patent & Trademark Office
A metal and oxygen material such as a transparent electrically conductive oxide material is electro deposited onto a substrate in a solution deposition process. Process parameters are controlled so as to result in the deposition of a high quality layer of material which is suitable for use in a back reflector structure of a high efficiency photovoltaic device. The deposition may be carried out in conjunction with a masking member which operates to restrict the deposition of the metal and oxygen material to specific portions of the substrate. In particular instances the deposition may be implemented in a continuous, roll-to-roll process. Further disclosed are semiconductor devices and components of semiconductor devices made by the present process, as well as apparatus for carrying out the process.
Liu, Shengzhong (Rochester Hills, MI), Hu, Chaolan (Rochester Hills, MI), Zhou, Yanhua (Rochester Hills, MI), Younan, Kais (Rochester Hills, MI), Dotter, II, Bud (Shelby Township, MI), Cannella, Vincent (Beverly Hills, MI), Banerjee, Arindam (Bloomfield Hills, MI), Yang, Jeffrey (Troy, MI), Guha, Subhendu (Bloomfield Hills, MI)
United Solar Ovonic LLC (Auburn Hills MI)
12/ 369,054
February 11, 2009
STATEMENT OF GOVERNMENT INTEREST [0001] This invention was made, at least in part, under U.S. Government, Department of Energy, Contract No. DE-FC36-07G017053. The Government may have rights in this invention.