A micro-electro-mechanical system for heating a sample including a substrate, a micro-channel flow channel in the substrate, a carrier fluid within the micro-channel flow channel for moving the sample in the micro-channel flow channel, and a microwave source that directs microwaves onto the sample in the micro-channel flow channel for heating the sample. The carrier fluid and the substrate are made of materials that are not appreciably heated by the microwaves. The microwave source includes conductive traces or strips and a microwave power source connected to the conductive traces or strips.
STATEMENT AS TO RIGHTS TO INVENTIONS MADE UNDER FEDERALLY SPONSORED RESEARCH AND DEVELOPMENT
 The United States Government has rights in this invention pursuant to Contract No. DE-AC52-07NA27344 between the United States Department of Energy and Lawrence Livermore National Security, LLC for the operation of Lawrence Livermore National Laboratory.